氦
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氦 |
杂质信息 |
气瓶规格 |
充装体积 |
阀门接口 |
|
纯氦4.0N |
Ne |
≤40ppm |
10L 40L 44L 47L 50L 40L×16 50L×16 |
1.25m3 5.00m3 5.50m3 7.00m3 8.80m3 80m3 146m3 |
G5/8 CGA580 DISS718 |
H2 |
≤7ppm |
||||
O2+Ar |
≤5ppm |
||||
N2 |
≤25ppm |
||||
CO |
≤1ppm |
||||
CO2 |
≤1ppm |
||||
CH4 |
≤1ppm |
||||
H20 |
≤20ppm |
||||
高纯氦5.0N |
Ne |
≤4ppm |
|||
H2 |
≤1ppm |
||||
O2+Ar |
≤1ppm |
||||
N2 |
≤2ppm |
||||
CO |
≤0.5ppm |
||||
CO2 |
≤0.5ppm |
||||
CH4 |
≤0.5ppm |
||||
H20 |
≤3ppm |
||||
高纯氦5.6N |
Ne |
≤2ppm |
|||
H2 |
≤0.1ppm |
||||
O2+Ar |
≤0.5ppm |
||||
N2 |
≤1ppm |
||||
CO |
≤0.1ppm |
||||
CO2 |
≤0.1ppm |
||||
CH4 |
≤0.1ppm |
||||
H20 |
≤2ppm |
||||
超纯氦6.0N |
Ne |
≤1ppm |
|||
H2 |
≤0.1ppm |
||||
O2+Ar |
≤0.1ppm |
||||
N2 |
≤0.1ppm |
||||
CO |
≤0.1ppm |
||||
CO2 |
≤0.1ppm |
||||
CH4 |
≤0.1ppm |
||||
H20 |
≤0.2ppm |
||||
气球氦 |
He |
≥99.5% |
22L |
15bar |
|
液氦 |
杜瓦罐
|
100L 250L 500L |
G5/8 CGA580 |